B/Si multilayers for soft x-ray and extreme ultraviolet optics

Terbium-based extreme ultraviolet multilayers.

We have fabricated periodic multilayers that comprise either Si/Tb or SiC/Tb bilayers, designed to operate as narrowband reflective coatings near 60 nm wavelength in the extreme ultraviolet (EUV). We find peak reflectance values in excess of 20% near normal incidence. The spectral bandpass of the best Si/Tb multilayer was measured to be 6.5 nm full width at half-maximum (FWHM), while SiC/Tb mul...

Thermal conduction properties of Mo/Si multilayers for extreme ultraviolet optics

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Soft X-rays and Extreme Ultraviolet Radiation: Principles and.

1.1 (a) Confirm that for a photon energy h ω, with corresponding wavelength λ in vacuum, the two are related by eV nm 1239.842 ⋅ = ⋅ λ ω h Values for physical constants are given in Appendix A, page 419. (b) What wavelength in nm corresponds to photons of energy 543.1 eV? (c) What wavelengths in vacuum are associated with the K and L-absorption edges of neon, chlorine, cobalt, and ruthenium? 1....

Extreme Ultraviolet Stokesmeter for Pulsed Magneto-Optics

Several applications in material science and magnetic holography using extreme ultraviolet (EUV) radiation require the measurement of the degree and state of polarization. In this work, an instrument to measure simultaneously both parameters from EUV pulses is presented. The instrument determines the Stokes parameters after a reflection on an array of multilayer mirrors at the Brewster angle. T...

SOFT X-RAYS AND EXTREME ULTRAVIOLET RADIATION Principles and Applications